Title:
学習装置、推論装置及び学習済みモデル
Document Type and Number:
Japanese Patent JP7126412
Kind Code:
B2
Abstract:
A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setting environmental information inside a process vessel in which the semiconductor manufacturing processes are performed and using a predetermined component provided in the process vessel as a variable, and XY coordinates parallel to a plane of a wafer are associated with each other; and an input part configured to input the calculated predetermined number of features to the input layer.
Inventors:
Kosuke Yamamoto
Takashi Fukudome
Ken Itabashi
Naoshige Fushimi
Kazua Matsuzaki
Takashi Fukudome
Ken Itabashi
Naoshige Fushimi
Kazua Matsuzaki
Application Number:
JP2018171015A
Publication Date:
August 26, 2022
Filing Date:
September 12, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/00; G06N99/00; H01L21/31
Domestic Patent References:
| JP2002149221A | ||||
| JP2018026558A | ||||
| JP2016058465A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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