Title:
LENGTH MEASURING EQUIPMENT
Document Type and Number:
Japanese Patent JP2564746
Kind Code:
B2
Abstract:
PURPOSE: To provide an equipment for measuring the height and the length of a sample automatically and accurately through simple operation with no effect of the distortion of image or inherent error of scanning type electronic microscope in which right and left images are matched by shifting the centers automatically in response to the designation of height measuring position or length measuring position on the screen, adjusting values are stored at that time, the operation is repeated, the height and the length are calculated from the difference of the adjusting values and displayed.
CONSTITUTION: The length measuring equipment comprises a motion control 42 for moving a designated height measuring position to the center of screen, a height measurement 43 for calculating an adjusting value when the right and left images are matched after movement to the center of screen, and a height calculation 44 for calculating the height ΔZ of the designated position from the difference of adjusting values calculated by the height measurement 43.
Inventors:
YAMAGUCHI NOBUYUKI
GOTO KATSUTO
SHIMATANI TAKASHI
GOTO KATSUTO
SHIMATANI TAKASHI
Application Number:
JP1911393A
Publication Date:
December 18, 1996
Filing Date:
February 08, 1993
Export Citation:
Assignee:
SANYU DENSHI KK
International Classes:
G01B11/02; G02B7/28; G02B21/00; H04N7/18; (IPC1-7): G01B11/02
Domestic Patent References:
| JP5918403A | ||||
| JP5853707A | ||||
| JP4203908A | ||||
| JP5918403A | ||||
| JP5828524B2 | ||||
| JP5418892B2 |
Attorney, Agent or Firm:
Morihiro Okada