Title:
LEVER FOR SOFT LANDING
Document Type and Number:
Japanese Patent JPS6212123
Kind Code:
A
Abstract:
PURPOSE: To make temperature measurement possible without exchanging the lever for soft landing and the thermocouple at each time of temperature measurement, and making temperature measurement possible in the state of processing products, by incorporating the thermocouple in the lever.
CONSTITUTION: The lever 1A for soft landing is made of quartz, and the thermocouple 2 is inserted in the thermocouple protection tube 3 of quartz which is welded to the lever 1A for soft landing. The use of this lever for soft landing makes it unnecessary to replace the lever for soft landing and the thermocouple at each time of temperature measurement.
Inventors:
SUGITA YUJI
Application Number:
JP15110885A
Publication Date:
January 21, 1987
Filing Date:
July 09, 1985
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
H01L21/205; H01L21/22; H01L21/31; (IPC1-7): H01L21/205; H01L21/22; H01L21/31
Attorney, Agent or Firm:
Sugano Naka