Title:
浮上搬送装置、及びレーザ処理装置
Document Type and Number:
Japanese Patent JP7437186
Kind Code:
B2
Abstract:
A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.
Inventors:
Takahiro Fuji
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi
Application Number:
JP2020030105A
Publication Date:
February 22, 2024
Filing Date:
February 26, 2020
Export Citation:
Assignee:
JSW Actina System Co., Ltd.
International Classes:
H01L21/677; B65G51/03; H01L21/268
Domestic Patent References:
| JP2009105377A | ||||
| JP2018064048A | ||||
| JP2009051672A | ||||
| JP2018060891A | ||||
| JP2006199483A |
Attorney, Agent or Firm:
Ken Ieiri