Title:
LIGHT-ABSORBING POLYMER, LIGHT-ABSORBING FILM-FORMING COMPOSITION AND LIGHT-ABSORBING FILM AND REFLECTION-PREVENTING FILM USING FILM USING THE SAME
Document Type and Number:
Japanese Patent JP3854367
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a light-absorbing polymer high insolubility in solvents for resists, and excellent in a reflection-preventing effect, a dry-etching property, heat resistance, adhesivity to substrates and resist films, etc., by using a monomer having a keto group in a slide chain for repeating units.
SOLUTION: This light-absorbing polymer contains at least (A) repeating units having keto groups in side chains and represented by formula I (R1, R2 are each an alkyl, etc.; R3 is an organic group having a carbonyl group) and (B) repeating units having organic chromophores absorbing prescribed light in side chains and represented by formula II (R4, R5 are each carboxyl, etc.; Y is a group having the organic chrolmophore absorbing the light having a prescribed wavelength wherein the organic chromophose is bound to the C atom of the main chain directly or through a bonding group). The repeating unit of formula I is preferbly e.g. a repeating unit of formula III [R6 is an organic group having at least one carbonyl group; X1 is NR7 (R7 is pehnyl, etc.), etc.], formula IV (R8-R10 are each H, etc.) or formula V (R11 is a divalent group; R12-R14 are each H, etc.).
Inventors:
Kang Wen Bin
Muniratuna Padmanavan
Hatsuko Tanaka
Takeshi Kimura
Takanori Kudo
Georg Pavlovski
Muniratuna Padmanavan
Hatsuko Tanaka
Takeshi Kimura
Takanori Kudo
Georg Pavlovski
Application Number:
JP14680097A
Publication Date:
December 06, 2006
Filing Date:
June 04, 1997
Export Citation:
Assignee:
az Electronic Materials Co., Ltd.
International Classes:
C08F220/54; G03F7/11; C08F212/32; C08F216/36; C08F220/18; C08F220/28; C08F220/36; C08F226/06; C08F246/00; C09D4/00; G03F7/09; (IPC1-7): C08F220/54; C08F220/18; C08F220/28; //C08F212/32; C08F216/36; C08F220/36; C08F226/06; G03F7/11; (C08F220/54; C08F220:28); (C08F220/18; C08F220:28)
Domestic Patent References:
| JP7126536A | ||||
| JP58103512A | ||||
| JP5034647A | ||||
| JP53107835A | ||||
| JP49039687A |
Attorney, Agent or Firm:
Hiroki Kaneo
Takeo Noguchi
Takeo Noguchi
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