To suppress the change of the shape of a light emitter, the space between the light emitters, and the space between the light emitter at the end and the end of the light-emitting diode array etc.
This light-emitting diode array comprises a semiconductor layer laminated on a substrate so that the array forms a light-emitting layer, a plurality of island-shaped light emitters arranged in one direction which are formed separately by etching the semiconductor layer, and electrodes each connected to the top face of the light emitter through the second side face of the light emitter except the first side face thereof wherein the first side faces of the light emitters facing each other. The second side face is a forward mesa surface, and the first side face is an intermediate mesa surface between the forward mesa and the reverse mesa. The first side face of the light emitter is formed by dry etching, and the second side face is formed by wet etching.
COPYRIGHT: (C)2007,JPO&INPIT
TOKYO SANYO ELECTRIC CO
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