Title:
光照射装置
Document Type and Number:
Japanese Patent JP4624438
Kind Code:
B2
Inventors:
Nakata Taisei
Application Number:
JP2008074608A
Publication Date:
February 02, 2011
Filing Date:
March 21, 2008
Export Citation:
Assignee:
CCS Inc.
Mitsubishi Chemical Corporation
Mitsubishi Chemical Corporation
International Classes:
A61N5/06; F21S2/00; F21V5/04; F21V29/00; H01L33/00; H01L33/58; F21Y101/02
Domestic Patent References:
| JP3111807U | ||||
| JP2004288474A | ||||
| JP4005007U | ||||
| JP2006040727A | ||||
| JP9201422A | ||||
| JP2003100123A | ||||
| JP2004355852A | ||||
| JP2006192073A | ||||
| JP2002093206A | ||||
| JP7307102A |
Attorney, Agent or Firm:
Ryuhei Nishimura