Title:
OPTICAL MEASURING METHOD AND OPTICAL MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2023069314
Kind Code:
A
Abstract:
To provide a method and apparatus capable of accurately measuring a moving object to be measured without any omission even if an arrangement of the object to be measured and light irradiation are not timed.SOLUTION: In an optical measuring apparatus 100, a light unit 200 irradiates an irradiation region that an object OBJ to be measured passes through with pulse light SIN which varies in wavelength with time at a predetermined repetition frequency. An optical detector 302 receives light SOBJ from the object OBJ to be measured which is irradiated with the pulse light SIN. A detection signal that the optical detector 302 generates is utilized to compute a spectrum of the object OBJ to be measured. Here, (f (D-d)/v)≥2.0 (1) holds for the repetition frequency f[Hz] frequency of the pulse light SIN, a moving-directional effective size D[m] of the object OBJ to be measured, a moving speed v[m/s] of the object OBJ to be measured, and a moving-directional size d[m] of an irradiation spot of the pulse light on a surface of the object OBJ to be measured.SELECTED DRAWING: Figure 1
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Inventors:
YAMADA TAKESHI
Application Number:
JP2021181094A
Publication Date:
May 18, 2023
Filing Date:
November 05, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
G01N21/27; G01J3/10
Attorney, Agent or Firm:
Kenki Morishita
Taiki Maya
Taiki Maya