PURPOSE: To prevent interference unevenness by forming the first layer made of amorphous (abbreviated to a from here) Si and Ge and the second photoconductive layer made of a-Si, and a surface layer made of a-SiC on a conductive substrate, and forming a pair or more of nonparallel planes in minute regions in these layers.
CONSTITUTION: The first layer 1002 made of a-SiGe and contg. a conductivity governing element, such as B or P, the second photoconductive layer 1003 made of Si alone without Ge, and contg. said conductivity governing element, and the surface layer 1006 made of a-SiC on the conductive substrate 1001 made of aluminum or the like to form the light receiving material 1004 (photosensitive body). Each interface of the substrate 1001 and each layer 1002, 1003 1006 of the material 1004 is roughened so as to cause each interface to form a nonparallel plane to each other in minute regions each having 0.3W500μm size, as shown like interfaces 703 and 704 in the other figure, thus permitting an interference pattern due to interference between the reflected lights from the interfaces light, such as laser beams, to be prevented.
KANAI MASAHIRO
SUEDA TETSUO
MISUMI TERUO
TSUETSUKI YOSHIO
OGAWA KYOSUKE
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