Title:
LIGHT RECEPTOR MEMBER AND MANUFACTURE OF IT
Document Type and Number:
Japanese Patent JP3459700
Kind Code:
B2
Abstract:
PURPOSE: To provide a light receptor member which is superior in electric characteristics and provides high resolution image, and its manufacture.
CONSTITUTION: This is a manufacture for a light receptor member where a photoconductive layer composed of amorphous material using a silicon atom as a base material, an intermediate layer, and a surface layer are laminated on a conductive support body in turn by a plasma CVD method and the connection between the intermediate layer and the surface layer is performed by changing silicon supply raw gas for supplying silicon atoms from 0.29sccm/sec to 27.6sccm/sec and carbon supply raw gas for supplying carbon atoms from 1.33 sccm/sec to 128sccm/sec under discharge voltage less than 20W/sec and internal pressure less than 30mmTorr/sec.
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Inventors:
Yoshio Segi
Hiroyuki Katagiri
Shirasuna Juukou
Hiroyuki Katagiri
Shirasuna Juukou
Application Number:
JP9091295A
Publication Date:
October 20, 2003
Filing Date:
April 17, 1995
Export Citation:
Assignee:
Canon Inc
International Classes:
G03G5/00; G03G5/08; (IPC1-7): G03G5/08
Domestic Patent References:
| JP63285553A | ||||
| JP6314164A | ||||
| JP628161A | ||||
| JP720649A | ||||
| JP6202361A | ||||
| JP5150532A | ||||
| JP554953A | ||||
| JP2203350A |
Attorney, Agent or Firm:
Akio Miyazaki (3 others)