Title:
LIGHT SCATTERING DUST PARTICLE DETECTOR
Document Type and Number:
Japanese Patent JPH1183725
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a light scattering dust particle detector which detects weaker laser light scattering optical signal, or, dust particle of smaller particle diameter. SOLUTION: Relating to a dust particle detector wherein dust particle is detected by measuring scattering light 21 occurring when a dust particle 17 passes a convergence region of a laser light 12, an optical filter 19 which allows light whose wavelength is identical with laser light to pass is allocated before a photo-detecting surface of a photoelectric transfer element 18 which transfers scattering light to optical current, and the laser light 12 is toured on a front surface of the optical filter 19 at a mirror reflection angle.
Inventors:
KIKUCHI TOSHIO
Application Number:
JP25781197A
Publication Date:
March 26, 1999
Filing Date:
September 05, 1997
Export Citation:
Assignee:
ANELVA CORP
International Classes:
G01N15/14; (IPC1-7): G01N15/14
Attorney, Agent or Firm:
Tamiya HiroshiKeisuke