Title:
LIGHT SOURCE DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF PRODUCING ARTICLE
Document Type and Number:
Japanese Patent JP2020170041
Kind Code:
A
Abstract:
To provide a light source device favorable for shortening a wait time for cooling a light source when maintenance working while reliably preventing breakage of a light source.SOLUTION: A light source device 100 includes: a light source 2; a cooling part 150 for cooling the light source 2; and a control part 7 for control the operation of the cooling part 150. The control part 7 heightens a cooling capacity of the cooling part 150 correspondingly to a lapsed time from the shutoff of the light source 2 within a range that the light source 2 is not broken, and the control part 7 heightens a cooling capacity of the cooling part 150 correspondingly to a lapsed time so that the cooling rate for cooling the light source 2 does not surpass a cooling rate causing the breakage of the light source 2.SELECTED DRAWING: Figure 2
Inventors:
FUJI HIROMITSU
Application Number:
JP2019070039A
Publication Date:
October 15, 2020
Filing Date:
April 01, 2019
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01J7/26
Domestic Patent References:
| JP2006106409A | 2006-04-20 | |||
| JP2002372748A | 2002-12-26 | |||
| JP2001250765A | 2001-09-14 | |||
| JPH11338163A | 1999-12-10 | |||
| JPH11340114A | 1999-12-10 | |||
| JP2004296125A | 2004-10-21 |
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu