Title:
光源装置
Document Type and Number:
Japanese Patent JP4514289
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a light source device which is small in size, easily maintained, provides sufficient output as an exposure light source and is low in cost. SOLUTION: The device is provided with a signal optical light source 1 which outputs monochromatic signal light beams within a wavelength range that covers from an infrared region to a visible ray region, a signal light beams branching means 2 which branches the signal light beams outputted from the source 1 into plural light beams and a polarized wave adjusted output means 10 which is provided with polarization controllers 4a1 to 4an that make the signal light beams branched by the means 2 into linearly polarized light beams having mutually equal polarization surface directions and a polarized wave holding section 5 that arrangement holds the linearly polarized light beams while the direction of the beams are put into a lined up condition. The source 1 and each output end of the means 2 are provided with optical amplifiers 'a' and 3b1 to 3bn. The means 10 lines up the signal light beams as linearly polarized light beams having equal polarization surfaces. The light beams are then made incident on a wavelength converting unit 6 which converts the wavelength of these linearly polarized light beams collectively into ultraviolet light beams.
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Inventors:
Katsuya Onui
Jutaro Miura
Hiramatsu Hideyo
Tomoko Otsuki
Soichi Yamato
Jutaro Miura
Hiramatsu Hideyo
Tomoko Otsuki
Soichi Yamato
Application Number:
JP2000178460A
Publication Date:
July 28, 2010
Filing Date:
June 14, 2000
Export Citation:
Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
NIKON CORPORATION
NIKON CORPORATION
International Classes:
G02B6/04; G02F1/37; H01L21/027
Domestic Patent References:
| JP7170008A | ||||
| JP10055005A | ||||
| JP4056925A | ||||
| JP5303027A | ||||
| JP2000066053A | ||||
| JP2001085307A |
Attorney, Agent or Firm:
Kiyoshi Igarashi