Title:
光源装置
Document Type and Number:
Japanese Patent JP6398839
Kind Code:
B2
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| WO/2001/091160 | LIGHT SOURCE |
Inventors:
Kenji Hayashi
Application Number:
JP2015072274A
Publication Date:
October 03, 2018
Filing Date:
March 31, 2015
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01J61/90; G02B19/00; G03F7/20
Domestic Patent References:
| JP6413030U | ||||
| JP9190975A | ||||
| JP2014235965A | ||||
| JP2008300298A |
Foreign References:
| US4974137 |
Attorney, Agent or Firm:
Tsutomu Igarata