LIGHTING DEVICE, LIGHTING METHOD, EXPOSURE DEVICE AND MANUFACTURING METHOD OF DEVICE

Title:

LIGHTING DEVICE, LIGHTING METHOD, EXPOSURE DEVICE AND MANUFACTURING METHOD OF DEVICE

Document Type and Number:

Japanese Patent JP2017198759

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a lighting device capable of maintaining illumination uniformity on an illumination surface easily at high accuracy, and maintaining uniformity of a CD regardless of a type of an imaging system.SOLUTION: A lighting device includes a light source 1 and an optical integrator 5 having a plurality of minute lenses uniformly illuminating an illumination surface. The optical integrator 5 includes, on an incident side, a plurality of luminous intensity adjustment members 4 divided according to the minute lenses of the optical integrator 5. Each luminous intensity adjustment member 4 has transmittance distribution. Each luminous intensity adjustment member 4 can be aligned.SELECTED DRAWING: Figure 1

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Inventors:

YOSHIOKA HITOSHI
OSAKA NOBORU
FUKUOKA RYOSUKE

Application Number:

JP2016087594A

Publication Date:

November 02, 2017

Filing Date:

April 26, 2016

Export Citation:

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Assignee:

CANON KK

International Classes:

G03F7/20; G02B3/06; G02B19/00

Attorney, Agent or Firm:

Yukio Takanashi

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