Title:
照明装置及び方法、露光装置及び方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP6806236
Kind Code:
B2
Abstract:
An illumination device that illuminates a mask, the illumination device comprising: a light source that generates illumination light; a variable-power optical system that adjusts the maximum inclination angle of the illumination light; a light guide fiber that maintains the inclination angle of the illumination light and splits the illumination light from the variable-power optical system; an input lens that converts the illumination light emitted from the emission end of the light guide fiber into a parallel flux; an aperture diaphragm that adjusts the number of apertures of the illumination light; and a condenser lens that guides to a mask the illumination light for which the number of apertures was adjusted. The usage efficiency of the illumination light can be increased in accordance with illumination conditions.
Inventors:
Masaki Kato
Application Number:
JP2019506258A
Publication Date:
January 06, 2021
Filing Date:
March 15, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP10270312A | ||||
| JP2000182933A | ||||
| JP2001166497A | ||||
| JP2000208396A | ||||
| JP2001155993A | ||||
| JP4225214A |
Foreign References:
| US6392742 |
Attorney, Agent or Firm:
Satoshi Omori