Title:
LINEAR MOTOR, STAGE DEVICE, AND ALIGNER
Document Type and Number:
Japanese Patent JP2004260941
Kind Code:
A
Abstract:
To provide a linear motor where a coil inside the linear motor is efficiently cooled with a simple technology for a constant temperature, allowing precision temperature control.
A linear motor 1 comprises a coil 13 and a can 12 for housing the coil 13, and is provided with a gap S1 in which a refrigerant C flows between the coil 13 and the can 12. A part of the gap S1 is provided with a regulation part 17 that deflects the flow direction of the refrigerant C to a prescribed direction.
Inventors:
TOTSU MASAHIRO
Application Number:
JP2003049664A
Publication Date:
September 16, 2004
Filing Date:
February 26, 2003
Export Citation:
Assignee:
NIKON CORP
International Classes:
B23Q5/28; H01L21/027; H02K9/19; H02K41/02; (IPC1-7): H02K41/02; B23Q5/28; H01L21/027; H02K9/19
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi