Title:
LINEAR MOTOR, STAGE USING THE SAME, ALIGNER
Document Type and Number:
Japanese Patent JP2001119918
Kind Code:
A
Abstract:
To provide a linear motor where the coils provided in its stator are suppressed from their consumption of excess power, their heat generations, and the heat transfers generated from them to the base-body sides of its stator.
Coils 111, 112 of a stator 110 are fastened to base bodies 161, 162 by fastening members 181, 182, 183. Joining areas (sectional areas) S of the fastening members 181, 182, 183 to the base bodies 161, 162 are determined, correspondingly to the heat distribution states of the coils 111, 112. The fastening members 181, 182, 183 are made of polycarbonate and are fitted into irregularities (spaces K1-K3) generated in a coil unit 150 to be bonded thereto.
Inventors:
TANAKA TOSHIHISA
TOTSU MASAHIRO
TOTSU MASAHIRO
Application Number:
JP29119199A
Publication Date:
April 27, 2001
Filing Date:
October 13, 1999
Export Citation:
Assignee:
NIKON CORP
International Classes:
H02K41/03; (IPC1-7): H02K41/03
Attorney, Agent or Firm:
Furuya Fumio (1 person outside)
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