To provide a linear motor which achieves free constitution of a long linear carrier system and cost reduction.
The linear motor consists of movable elements 11, 21, 31, 61 provided with a scale 4 of a linear scale and a permanent magnet, a sensor 63 for reading the scale 64, and stators 12, 22, 32, 62 provided with a coil generating a shifting magnetic field to the permanent magnet. The stator 12 is taken as a unit module separated in a unit length. A position control device for successively carrying out travelling or positioning over the unit module by a command to the respective modules from a higher level controller is provided to the inside of the rotor. The motor permits at least one of horizontal turn, horizontal parallel movement and vertical parallel movement to at least one unit module 12T of the unit modules.
MIYAMOTO TADAHIRO
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Yuriko Kuriu
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