PURPOSE: To suppress deformation of a raceway surface and improve positioning accuracy of a movable element by providing a hole or notch between a fitting part and the raceway surface of a frame plate.
CONSTITUTION: A hole 54 is formed between a raceway surface 52 and a fitting part 53 out of a frame plate 51 of a linear pulse motor stator. This hole 53 makes a rigidity of a portion between the fitting part 53 and the raceway surface 52 lower than that of a raceway surface 52-forming part. Therefore, deformation of the fitting part 53 is absorbed by a hole 54-forming part with low rigidity when a linear pulse motor is fitted to a base stand 42 by screws 41 using the fitting part 53. As a result, a deformation of the fitting part 53 is not propagated to the raceway surface 52 and that of the raceway surface 52 is suppressed so that a positioning accuracy of the movable element is improved.
WATANABE TOSHIHIKO