Title:
垂直炉用のライナーおよびフランジ組立品ならびにライナーおよび垂直炉
Document Type and Number:
Japanese Patent JP7254762
Kind Code:
B2
Abstract:
a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.
Inventors:
Lucian Idira
Chris de Ridder
Theodorus Oosterlaken
Klaas P. Bournestra
Chris de Ridder
Theodorus Oosterlaken
Klaas P. Bournestra
Application Number:
JP2020502654A
Publication Date:
April 10, 2023
Filing Date:
July 25, 2018
Export Citation:
Assignee:
AS MIP Holding B F
International Classes:
H01L21/31; C23C16/24; C23C16/34; C23C16/40; C23C16/42; H01L21/205; H01L21/683
Domestic Patent References:
| JP2011061037A | ||||
| JP2007243201A | ||||
| JP2014236129A | ||||
| JP2009054988A | ||||
| JP2002110562A | ||||
| JP2004319979A |
Attorney, Agent or Firm:
Murayama Yasuhiko
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe