Title:
LIQUID COMPONENT MEASUREMENT DEVICE AND LIQUID COMPONENT MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2023047751
Kind Code:
A
Abstract:
To provide a liquid component measurement device capable of measuring the amounts of components in a treatment liquid on a substrate while treating the substrate and determining the presence or absence of the influence of rippling of a treatment liquid surface.SOLUTION: A liquid component measurement device 20 is provided, comprising a light projection unit 23 configured to irradiate a treatment liquid S supplied onto a revolving substrate W with a light beam, a light reception unit 24 configured to receive light passing through the treatment liquid, a light measurement unit 25 configured to measure intensity of the received light at a sampling rate that enables identification of received light intensity fluctuation due to rippling of a surface of the treatment liquid, and a computation unit 27 configured to receive the received light intensity from the measurement unit to derive abundance of one or more components contained in the treatment liquid.SELECTED DRAWING: Figure 1
Inventors:
YASUDA NOBUYOSHI
YAMAGUCHI SHOHEI
YAMAGUCHI SHOHEI
Application Number:
JP2021156849A
Publication Date:
April 06, 2023
Filing Date:
September 27, 2021
Export Citation:
Assignee:
KURASHIKI BOSEKI KK
International Classes:
G01N21/3577; G01N21/359
Attorney, Agent or Firm:
Kawahara Tetsuro
Previous Patent: Semiconductor device and its manufacturing method
Next Patent: Wireless data transmission system and wireless data transmission method
Next Patent: Wireless data transmission system and wireless data transmission method