Title:
LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH05289105
Kind Code:
A
Abstract:
PURPOSE:To provide a structure which is suitable for obtaining a larger-sized and higher accurate device, enables the attainment of a high production yield and can be produced with a simple process for production and the process for production, for the formation of a thin-film semiconductor device for the liquid crystal display device. CONSTITUTION:A scanning signal electrode is formed of the laminated films of a Ta electrode 10 and Al electrode formed with an anodized film on the surface and only the Ta electrode 10 is exposed by etching away the Al electrode for an upper layer using the anodized film as a mask in an external connecting terminal part. An a-Si:H film 30 and a gate SiN film 22 are worked to the same pattern. Further, a video signal electrode 14 and a picture element electrode 13 are constituted of the laminated films of ITO and the Ti electrode to be patterned by one time of photoetching stage. The Ti film of the light transparent part on the picture element electrode 13 is removed using the pattern of a protective SiN film 23 as a mask.
Inventors:
KAWACHI GENSHIROU
ONO KIKUO
WAKUI TAKAYUKI
ABU KOICHI
KONISHI NOBUTAKE
SUZUKI TAKASHI
ONO KIKUO
WAKUI TAKAYUKI
ABU KOICHI
KONISHI NOBUTAKE
SUZUKI TAKASHI
Application Number:
JP9405792A
Publication Date:
November 05, 1993
Filing Date:
April 14, 1992
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; (IPC1-7): G02F1/136; G02F1/1343
Attorney, Agent or Firm:
Ogawa Katsuo