To provide a liquid crystal display device having a video signal line of a bottom gate type TFT meeting respective required conditions of low resistance, dry etching resistance, selective wet etching of a gate insulating film, ≤2 laminated layers, and tapering of section.
The video signal line is a laminated film formed of a 1st conductive film as a lower layer and a 2nd conductive film as an upper layer; and the 1st conductive film uses alloy which principally consists of Mo and contains W and the 2nd conductive film uses alloy which principally consists of Mo and contains Zr to have lamination constitution. The liquid crystal display device is provided which has the video signal line of the bottom gate type TFT meeting the respective required conditions of low resistance, dry etching resistance, selective wet etching of the gate insulating film, ≤2 laminated layers, and tapering of section.
KANEKO TOSHITERU
TAMURA KATSU
KIZAWA KENICHI
