Title:
液体吐出ヘッド及び液体吐出装置
Document Type and Number:
Japanese Patent JP4058691
Kind Code:
B2
Abstract:
A piezoelectric element comprises a diaphragm 30, a lower electrode 42d formed in a prescribed pattern on the diaphragm, a piezoelectric film 43 formed on the lower electrode, and upper electrodes 44 formed on the piezoelectric film. A metallic layer 42b electrically disconnected from the upper electrodes and the lower electrode is formed on the diaphragm in the vicinity of the piezoelectric film. The gap between the lower electrode and the metallic layer is no more than 200 mu m. In this way, excellent crystallinity of the piezoelectric film can be achieved also in the vicinity of the edges of the lower electrode, thereby making it possible to provide piezoelectric elements and a liquid discharge head that can withstand high voltage and are of better reliability.
Inventors:
Masami Murai
Application Number:
JP2003308459A
Publication Date:
March 12, 2008
Filing Date:
September 01, 2003
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/187; H01L41/22; H01L41/29; H01L41/332; H02N2/00
Domestic Patent References:
| JP2002261347A | ||||
| JP2000211134A | ||||
| JP200339707A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga