PURPOSE: To obtain a bubble jet type liquid injection recording head of novel material and novel structure by forming a V-shaped groove on a board, providing a heat generator on the sidewall of the groove, joining a flat platelike cover plate, and forming the section of a passage and orifices in a triangular shape.
CONSTITUTION: A pattern of a heat generator 25, a control electrode 26a, a ground electrode 26b, etc. is formed through an SiO2 film 24 of a heat storage layer 24 on the sidewall of the V-shaped groove 21' of an Si board 21 formed with a V-shaped groove. The board 21 is formed of single crystalline Si as a material, has large thermal conductivity to be advantageous for the heat sink of the board, and an accurate V-shaped groove can be formed by utilizing the anisotropic etching of the Si. The generator 25 employs as its material hafnium boride, zirconium boride, etc., a protective layer employs as its material silicon oxide, silicon nitride, zirconium oxide, etc., and both are formed by a method such as an electronic beam deposition, a sputtering, etc. After the generator 25, the electrode 26b, the protective layer, etc. are formed on the sidewall 21' of the groove, a cover board is joined, and a passage, and orifices are completed.