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Title:
LIQUID INJECTION RECORDING HEAD
Document Type and Number:
Japanese Patent JPH01259958
Kind Code:
A
Abstract:

PURPOSE: To obtain a bubble jet type liquid injection recording head of novel material and novel structure by forming a V-shaped groove on a board, providing a heat generator on the sidewall of the groove, joining a flat platelike cover plate, and forming the section of a passage and orifices in a triangular shape.

CONSTITUTION: A pattern of a heat generator 25, a control electrode 26a, a ground electrode 26b, etc. is formed through an SiO2 film 24 of a heat storage layer 24 on the sidewall of the V-shaped groove 21' of an Si board 21 formed with a V-shaped groove. The board 21 is formed of single crystalline Si as a material, has large thermal conductivity to be advantageous for the heat sink of the board, and an accurate V-shaped groove can be formed by utilizing the anisotropic etching of the Si. The generator 25 employs as its material hafnium boride, zirconium boride, etc., a protective layer employs as its material silicon oxide, silicon nitride, zirconium oxide, etc., and both are formed by a method such as an electronic beam deposition, a sputtering, etc. After the generator 25, the electrode 26b, the protective layer, etc. are formed on the sidewall 21' of the groove, a cover board is joined, and a passage, and orifices are completed.


Inventors:
SEKIYA TAKURO
Application Number:
JP8935088A
Publication Date:
October 17, 1989
Filing Date:
April 12, 1988
Export Citation:
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Assignee:
RICOH KK
International Classes:
B41J2/05; B41J2/14; B41J2/16; (IPC1-7): B41J3/04
Attorney, Agent or Firm:
Akinaka Takano