Title:
LIQUID JET HEAD, LIQUID JET DEVICE, AND METHOD OF MANUFACTURING LIQUID JET HEAD
Document Type and Number:
Japanese Patent JP2005125638
Kind Code:
A
Abstract:
To prevent deterioration of a heating element even when occurrence of a step is avoided by an SOG film in relation to a liquid jet head, a liquid jet device and a method of manufacturing the liquid jet head, particularly, a thermal type inkjet printer in which a heating element and a transistor for driving the heating element are integrally formed on a substrate.
A process of depositing a coating type insulation material film and a process of removing the insulation material film in a region for forming the heating element by etching are repeated two or more times.
Inventors:
MIYAMOTO TAKAAKI
KONO MINORU
TATEISHI OSAMU
KONO MINORU
TATEISHI OSAMU
Application Number:
JP2003364395A
Publication Date:
May 19, 2005
Filing Date:
October 24, 2003
Export Citation:
Assignee:
SONY CORP
International Classes:
B41J2/14; B41J2/16; B41J2/05; (IPC1-7): B41J2/05; B41J2/16
Attorney, Agent or Firm:
Shigenori Tada
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