Title:
LIQUID LEAKAGE SENSOR ELEMENT AND SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2021056068
Kind Code:
A
Abstract:
To reduce the device size.SOLUTION: The present invention comprises: a support substrate 1; an optical waveguide core 2 through which verification light propagates; a clad 5 formed on the support substrate 1 including the outer circumference of the optical waveguide core 2; and a recess 9a formed on the outermost surface of the clad 5 in the width direction of the optical waveguide core 2 orthogonal to the optical axis of the verification light in the optical waveguide core 2, for dividing the optical waveguide core 2 into a first waveguide 3 and a second waveguide 4. The recess 9a is made such that a first boundary face 6 which is a boundary face between the recess 9a and the first waveguide 3 intersects with the optical axis of the verification light at right angles, and a second boundary face 7 which is a boundary face between the recess 9a and the second waveguide 4 intersects with a boundary face 8 between the support substrate 1 and the clad 5 at a sharp angle.SELECTED DRAWING: Figure 1
Inventors:
TODA NORIHIKO
ONAWA YOSUKE
SHIMURA DAISUKE
SASAKI HIRONORI
ONAWA YOSUKE
SHIMURA DAISUKE
SASAKI HIRONORI
Application Number:
JP2019178586A
Publication Date:
April 08, 2021
Filing Date:
September 30, 2019
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G01M3/38; G01F23/292; G02B6/122; G02B6/26; G02B6/42
Attorney, Agent or Firm:
Nosho Machida
Yoshifumi Otsuka
Isono International Patent and Trademark Office
Yoshifumi Otsuka
Isono International Patent and Trademark Office