LIQUID MATERIAL VAPORIZING DEVICE - HORIBA STEC Co., Ltd.

Title:

LIQUID MATERIAL VAPORIZING DEVICE

Document Type and Number:

Japanese Patent JP3881569

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a liquid material vaporizing device that can smoothly vaporize a liquid material at a high speed, without causing the liquid material to flow in reverse to a carrier gas supply path side.
SOLUTION: This liquid material vaporizing device is constituted to mix the liquid material LM with a carrier gas CG in a gas-liquid mixing chamber 6, provided in a control valve 1 having a liquid flow-rate control function by controlling the flow rates of the material LM and gas CG and to vaporize the material LM by reducing the pressure of the material LM by discharging the gas-liquid mixture from a nozzle section 8 formed in the downstream-side vicinity of the mixing chamber 6. In this vaporization device, a nozzle section 7 is formed in a flow passage 4, through which the carrier gas CG is supplied in the vicinity of the mixing chamber 6 for preventing the reverse flow of the material LM.

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Inventors:

Hideaki Miyamoto
Nishida
Tetsuo Shimizu

Application Number:

JP2002069111A

Publication Date:

February 14, 2007

Filing Date:

March 13, 2002

Export Citation:

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