Title:
液マイクロメータ
Document Type and Number:
Japanese Patent JP6883325
Kind Code:
B2
Abstract:
A liquid micrometer which includes: a liquid flow path which supplies liquid from a liquid supply device to a discharge nozzle; a flow rate sensor provided in the liquid flow path; a control valve provided in the liquid flow path between the liquid supply device and the flow rate sensor; a controller which controls the control valve such that a flow rate measured by the flow rate sensor becomes equal to a set value; a pressure sensor which measures pressure of the liquid injected from the discharge nozzle; and a calculating section which calculates the size of a work from the pressure measured by the pressure sensor in a state where the flow rate is maintained at the set value by the controller.
Inventors:
Kazuhiro Yoshikawa
Makio Asano
Hashimoto Ichizo
Takuya Tsuzuki
Kimihito Sasao
Makio Asano
Hashimoto Ichizo
Takuya Tsuzuki
Kimihito Sasao
Application Number:
JP2017153857A
Publication Date:
June 09, 2021
Filing Date:
August 09, 2017
Export Citation:
Assignee:
Advance Electric Industry Co., Ltd.
International Classes:
G01B13/02
Domestic Patent References:
| JP60171511A | ||||
| JP60158208U |
Foreign References:
| US20110209529 |
Attorney, Agent or Firm:
Shinichi Abe
Yoshihiro Shimizu
Yuji Tsujida
Takaaki Ota
Yoshihiro Shimizu
Yuji Tsujida
Takaaki Ota