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Title:
液体窒素供給装置
Document Type and Number:
Japanese Patent JP4225763
Kind Code:
B2
Abstract:

To provide a liquid nitrogen supply apparatus of which filter elements can be dried in-line on completion of a perfectness test of disinfection filters and in which a heat insulator can easily be detached from the disinfection filters.

Disinfection filters 6 installed in first and second liquefied nitrogen supply lines 31, 32of the liquefied nitrogen supply apparatus 1 are housed in freely closable heat insulated cases 7: test fluid supply lines 9 for supplying a test fluid from a perfectness testing apparatus 8 are made to communicate with the disinfection filters 6; and hot air supply lines 4 and hot air discharge lines 5 for discharging steam-containing hot air passed through the disinfection filters 6 are made to communicate with the inlet side and the outlet side, respectively, of the disinfection filters 6 of the first and the second liquefied nitrogen supply lines 31, 32.

COPYRIGHT: (C)2004,JPO


Inventors:
Naoki Wada
Ogawa Kei
Application Number:
JP2002305945A
Publication Date:
February 18, 2009
Filing Date:
October 21, 2002
Export Citation:
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Assignee:
Iwatani Corporation
International Classes:
B01J4/00; B65B31/00; B01D29/11; B01D65/10; B65B63/08; C01B21/04
Domestic Patent References:
JP5023551A
JP2002347715A
JP2000281187A
JP2000185710A
JP9166294A
JP2000042397A
Attorney, Agent or Firm:
Shoji Suzue
Toshiyuki Kimura
Shoichi Kanamaru