Title:
LIQUID PHASE EPITAXIAL GROWTH OVEN
Document Type and Number:
Japanese Patent JPH06287099
Kind Code:
A
Abstract:
PURPOSE: To provide a method for shortening the time required for growth without reducing the quality of a grown film by improving the heat radiation properties of the oven body and increasing the rate of temperature drop after completion of growth, especially in a range of ≤400°C in an LPE oven.
CONSTITUTION: A cooling tube 4 is wound around the outside of an electrical resistance heater 3 of the conventional LPE oven. After completion of growth, cooling water is circulated through the above-mentioned cooling tube 4 so as to promote cooling at a point of time when the temperature in the core tube reaches 400°C.
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Inventors:
TOMIYAMA KATSUTO
Application Number:
JP9663793A
Publication Date:
October 11, 1994
Filing Date:
March 30, 1993
Export Citation:
Assignee:
TOKIN CORP
International Classes:
C30B19/08; H01L21/208; (IPC1-7): C30B19/08
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