Title:
液体温度制御装置及び方法
Document Type and Number:
Japanese Patent JP6931093
Kind Code:
B2
Abstract:
A liquid temperature-control apparatus and method. The liquid temperature-control apparatus comprises: a circulating cooling unit for providing thermal energy and a cooling capacity for an object to be cooled; a circulating coolness application unit connected to the circulating cooling unit and used for circularly providing coolness to the object to be cooled; a heat exchange unit for carrying out heat exchange between the circulating cooling unit and the circulating coolness application unit; and a temperature detection and control unit for monitoring the temperature of the circulating cooling unit and that of the circulating coolness application unit. With the most fundamental circulating cooling unit, there is no need to weld and add any component to the circulating cooling unit, there are less welding spots in the circulating cooling unit, and there is no risk of refrigerant leakage, such that the reliability is relatively improved.
Inventors:
Wang Ming
Hao Hondo
Moridome
Hao Hondo
Moridome
Application Number:
JP2019570525A
Publication Date:
September 01, 2021
Filing Date:
June 26, 2018
Export Citation:
Assignee:
Shanghai Micro Electronics Equipment (Group) Company Limited
International Classes:
F25B49/02; F25B1/00; F25B29/00; F25B41/20; F25B41/31
Domestic Patent References:
| JP2008292026A |
Attorney, Agent or Firm:
Hiroshi Oue