Title:
LIQUID TREATMENT SYSTEM
Document Type and Number:
Japanese Patent JP2002256496
Kind Code:
A
Abstract:
To provide a liquid treatment system which can keep a housing airtight and can prevent corrosion of the housing.
A method for preventing corrosion of housing 4 comprises covering a frame 11 and each panel 12 which compose housing 4, with a tubular synthetic-resin film 15, and heating it to cover the frame 11 and the panels 12 sealingly with the shrinked film 15 by the heat.
Inventors:
OKASE WATARU
YAMAUCHI JUN
MATSUO TAKENOBU
YAMAUCHI JUN
MATSUO TAKENOBU
Application Number:
JP2001060320A
Publication Date:
September 11, 2002
Filing Date:
March 05, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
C25D7/12; C25D17/00; (IPC1-7): C25D17/00; C25D7/12
Attorney, Agent or Firm:
Suyama Saichi
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