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Patent Searching and Data


Title:
LIQUID TREATMENT VESSEL
Document Type and Number:
Japanese Patent JPH0677206
Kind Code:
A
Abstract:

PURPOSE: To facilitate the replacement of a filter film by circulating the treatment solution used for wet treatment.

CONSTITUTION: The title liquid treatment vessel is constructed in such a manner that a filter 3 is formed between an inner vessel 1 and an outer vessel 2, the chemical solution overflowed from the inner vessel 1 is received by the outer vessel 2, and the chemical solution is passed through a filter 3, circulated to the inner vessel 1 by a pump 4 through a piping 5 from the lower side of the outer vessel 2. As a result, the filter 3 can be replaced easily. Accordingly, as the filter is not provided in the midway of the piping, it can be washed by a shower washing by removing the chemical solution in the vessel, and it can be replaced easily.


Inventors:
OKUNO MICHIHIRO
Application Number:
JP22680792A
Publication Date:
March 18, 1994
Filing Date:
August 26, 1992
Export Citation:
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Assignee:
KANSAI NIPPON ELECTRIC
International Classes:
H01L21/306; (IPC1-7): H01L21/306