Title:
測定装置を有するリトグラフ投影装置
Document Type and Number:
Japanese Patent JP4335084
Kind Code:
B2
Abstract:
A lithographic apparatus includes a measurement system including at least one optical component and at least one electrical component. The electrical component is configured to dissipate heat. The optical component is mounted on a first frame of the apparatus, and the electrical component is mounted on a second frame of the apparatus that is thermally and mechanically decoupled from the first frame. An optical coupling is provided between the first frame and the second frame.
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Inventors:
Gerrit Johannes Nymeyer
Anastasius Jacobs Anisetus Blue Insuma
Christian alexander hogendam
Jeroent Thomas Broek Hoyce
Sigurs dresser
Edwin Eduard Nicolas Josephs Kriyunen
Robert Edgar van Leeuwen
Loeland Nicolas Maria Funnel
Cornelis Christiaan Ottens
Anastasius Jacobs Anisetus Blue Insuma
Christian alexander hogendam
Jeroent Thomas Broek Hoyce
Sigurs dresser
Edwin Eduard Nicolas Josephs Kriyunen
Robert Edgar van Leeuwen
Loeland Nicolas Maria Funnel
Cornelis Christiaan Ottens
Application Number:
JP2004195102A
Publication Date:
September 30, 2009
Filing Date:
July 01, 2004
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/207; H01L21/027; G03F7/20; G03F9/00; H01L21/68
Domestic Patent References:
| JP2001052986A | ||||
| JP11219900A | ||||
| JP2002203763A | ||||
| JP7235475A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki