LITHOGRAPHIC MOVEMENT CONTROL SYSTEM AND METHOD

Title:

LITHOGRAPHIC MOVEMENT CONTROL SYSTEM AND METHOD

Document Type and Number:

Japanese Patent JP2005354088

Kind Code:

A

Abstract:

To provide a lithographic movement control system and a method having an exact feedforward.

A control system has an actuator for moving a movable component and a feedforward path up to the actuator from a target value input part of the control system. The control system further has a feedback loop and a feedforward transmission function of the feedforward path wherein a part of the actuator transmission function including a part having a stable inversion and a remaining part potentially having an unstable inversion is inverted. A target value path includes a target value delay function, and the feedforward transmission function further includes a second feedforward transmission function part. A delay difference between the target value delay function and the second feedforward transmission function part corresponds to the delay of the potentially unstable remaining part of the actuator transmission function.

Inventors:

VAN DONKELAAR EDWIN T
VAN DEN BIGGELAAR PETRUS MARIN

Application Number:

JP2005179853A

Publication Date:

December 22, 2005

Filing Date:

May 24, 2005

Export Citation:

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Assignee:

ASML NETHERLANDS BV

International Classes:

G03F7/20; G05B13/02; G05B13/04; G05B21/02; H01L21/027; (IPC1-7): H01L21/027; G03F7/20

Attorney, Agent or Firm:

Hideto Asamura
Hajime Asamura
Toru Mori
Yukio Iwamoto

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