Title:
リソグラフィ装置およびその使用方法
Document Type and Number:
Japanese Patent JP4392413
Kind Code:
B2
Abstract:
An apparatus and method for imaging a pattern onto a substrate is described. A recipe for producing an image includes optional tool-type information. Where tool-type information indicates that the recipe pertains to a different tool type, the apparatus makes adjustments to its imaging settings in order to emulate performance of the different tool type.
Inventors:
Marines Johannes Maria Juan Dam
Application Number:
JP2006077032A
Publication Date:
January 06, 2010
Filing Date:
March 20, 2006
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP9320957A | ||||
| JP2001126983A | ||||
| JP2005045265A | ||||
| JP2003162042A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki