PURPOSE: To provide a load detector in which accuracy and reliability are enhanced by suppressing the aging and the fluctuation of characteristics due to temperature variation, productivity is enhanced by facilitating the manufacture, and the detection accuracy is enhanced by enhancing the output sensitivity.
CONSTITUTION: In a Wheatstone bridge circuit, one set of resistor thick films 6c1, 6c3 are fired for a body 6a distorting upon application of load whereas the other opposing set of resistor films 6c2, 6c4 are fired for a base body 6j arranged in parallel with the body 6a and applied with no load. Wiring for connecting the resistor thick films 6c to constitute a Wheatstone bridge is formed of a conductor thick film 6d fired for the body 6a and the base body 6j. The distortion detecting direction of the one set of resistor thick films 6c1, 6c3 fired for the body 6a is set in the load detecting direction whereas the distortion detecting of the other set of resistor thick films 6c2, 6c4 fired for the base body 6j is set in a direction intersecting the load detecting direction.
WO/2018/175539 | INTRAOCULAR PRESSURE SENSOR |
JPH10141945 | THROUGH ELECTRODE MOUNTING STRUCTURE |
NAGAI YUJIRO