Title:
PRODUCTION CONTROL SYSTEM AND METHOD
Document Type and Number:
Japanese Patent JP3144369
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To automatically carry out a reconstruction setting process for operation troubles in a semiconductor production line, so as to enable the reconstruction setting process to be shortened in setting time and prevented from being set erroneously by an operator.
SOLUTION: A production control system is equipped with a host computer 6 which comprises an operation procedure data base 1, a check experience knowledge data base 2, an operation instruction part 3, a standard check part 4, and a reconstruction setting part 5; an operation procedure input part 7 which inputs operation procedure data into the operation procedure data base 1, a check experience knowledge data input part 8 which inputs check experience knowledge data into the check experience knowledge data base 2, a production line 10 composed of equipment 11-1 to 11-m, and measurement equipment 12-1 to 12-n, and a communication part 9 which transmits data back and forth from the host computer 6 to the production line 10.
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Inventors:
Toshihiro Sada
Application Number:
JP41698A
Publication Date:
March 12, 2001
Filing Date:
January 05, 1998
Export Citation:
Assignee:
NEC
International Classes:
B23Q41/08; B65G61/00; G05B15/02; G05B19/418; G06Q50/00; G06Q50/04; H01L21/02; (IPC1-7): H01L21/02; B23Q41/08; G05B15/02; G06F17/60
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)