Title:
LOAD LOCK APPARATUS, DEVICE MANUFACTURING APPARATUS AND METHOD
Document Type and Number:
Japanese Patent JP2007142337
Kind Code:
A
Abstract:
To provide a technology which can quickly replace the decreased pressure or atmosphere in a load lock chamber in a state that a wafer cassette or a substrate is charged.
A load lock apparatus includes an upper wall 14 and a lower wall 15 of a movable member which composes a part of a member providing the volume of the load lock chamber 3 and a driving mechanism which drives the movable members. The driving mechanism changes the volume of the load lock chamber 3 by driving the movable members 14, 15 after charging an object 6 into the load lock chamber 3 and before discharging the object from the load lock chamber 3.
Inventors:
NISHIMURA NAOAKI
Application Number:
JP2005337496A
Publication Date:
June 07, 2007
Filing Date:
November 22, 2005
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/677; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura