Title:
試料分析システム用のロードロックチャンバ組立体ならびに関連した質量分析計システムおよび方法
Document Type and Number:
Japanese Patent JP7317864
Kind Code:
B2
Abstract:
Load lock assemblies for a sample analysis system, such as a mass spectrometry system, include a load lock chamber having longitudinally opposing first and second end portions and a through channel, a door coupled to the second end portion, and a seal assembly coupled to the first end portion. The seal assembly includes a rigid seal housing member coupled to a housing of the load lock chamber. The rigid seal housing member includes a port forming part of the first end portion of the through channel of the load lock chamber. The rigid seal housing member can include a self-centering cartridge and/or a flexure member coupled to the housing of the load lock chamber. Where used, the flexure member has an outer perimeter that extends above and below the rigid seal housing member and includes an aperture that is aligned with the port of the rigid seal housing member.
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Inventors:
brock, jared
Collins, Scott
talmer, mark
Collins, Scott
talmer, mark
Application Number:
JP2020564802A
Publication Date:
July 31, 2023
Filing Date:
February 11, 2019
Export Citation:
Assignee:
BioMerieux Incorporated
International Classes:
H01J49/04; H01J37/20
Foreign References:
| US20160225596 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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