Title:
ロードポート、および、ＥＦＥＭ
Document Type and Number:
Japanese Patent JP7177333
Kind Code:
B2
Abstract:
The present invention provides a technique capable of implementing weight reduction of a load port while securing proper operation of the load port. A load port (1) comprises: a base unit (10) installed so as to block an opening formed on a processing device; and driving devices (40, 50) installed on the base unit (10). The base unit (10) comprises: a port frame (110) forming at least a part of a frame surrounding a wafer passing opening part (11) for passing a wafer; and a support plate (120) connected to the port frame (110), having higher hardness than the port frame (110), and supporting the driving devices (40, 50).
Inventors:
Taniyama Ikushi
Morinaka Toshimitsu
Morinaka Toshimitsu
Application Number:
JP2018127296A
Publication Date:
November 24, 2022
Filing Date:
July 04, 2018
Export Citation:
Assignee:
Sinfonia Technology Co., Ltd.
International Classes:
H01L21/677
Domestic Patent References:
| JP2014049453A | ||||
| JP2005520321A |
Attorney, Agent or Firm:
Masanao Onishi