To provide a local heating apparatus which can efficiently and uniformly dry a coating liquid or a thermosetting member while preventing the influence of heating on the members other than a substrate being a heating object without applying surplus stress on the substrate.
The local heating apparatus comprises: a conveying means conveying a substrate 1; and a substrate supporting member 4 where the circumferences of the side parts are surrounded to form spaces 11 having openings at the upper and the lower parts, and the whole circumference of the upper opening edge is contacted with the lower face of the substrate 1 to support the substrate 1. The apparatus is further provided with: a non-contact heating means 3 located at the inside of each space 11 in a state where the substrate supporting member 4 supports the substrate 1, jets a hot blast to the lower face side of the local position being the heating object of the substrate 1, and heats the local position in a non-contact state; and an exhaust means connected so as to be communicated with each space 11, and exhausts the air present in each space 11.
COPYRIGHT: (C)2010,JPO&INPIT
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
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