Title:
LOCAL VACUUM TREATING APPARATUS
Document Type and Number:
Japanese Patent JPS6071038
Kind Code:
A
Abstract:
Localized vacuum envelope apparatus includes a housing member having a bottom plate with a downwardly extending first sleeve and an upwardly extending flange. The flange includes ports for vacuum pumping and is adapted for attachment to an electron beam column. The apparatus further includes a lower plate having a second downwardly extending sleeve and an upper plate having a third downwardly extending sleeve. The first, second and third sleeves, which can have a truncated conical shape and are concentric, define vacuum zones. Channels are provided for connecting the vacuum zones to individual ports. The tips of the sleeves are coplanar and form the tip of the vacuum envelope. A noncontacting graded vacuum seal is formed between the tip of the vacuum envelope and a workpiece. The housing member and the upper plate can be ferromagnetic material to provide double magnetic shielding.
Inventors:
POORU EFU PETORITSUKU
MAIKURU ESU FUOUREI
MAIKURU ESU FUOUREI
Application Number:
JP17947984A
Publication Date:
April 22, 1985
Filing Date:
August 30, 1984
Export Citation:
Assignee:
VARIAN ASSOCIATES
International Classes:
B01J3/00; H01J37/18; H01J37/317; H01L21/027; (IPC1-7): B01J19/00
Attorney, Agent or Firm:
Sumio Takeuchi