エアーカーテン付き低露点作業装置及びエアーカーテン付き低露点作業設備

Title:

エアーカーテン付き低露点作業装置及びエアーカーテン付き低露点作業設備

Document Type and Number:

Japanese Patent JP4377469

Kind Code:

B2

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Inventors:

Mutsuo Ohta
Kenichi Oda

Application Number:

JP3144699A

Publication Date:

December 02, 2009

Filing Date:

February 09, 1999

Export Citation:

Assignee:

Takasago Thermal Engineering Co., Ltd.

International Classes:

F24F7/06; B01L1/00; F24F9/00

Domestic Patent References:

Attorney, Agent or Firm:

Tsutomu Toyama
Hidemi Matsukura
Yutaka Nagata
Yoshiyuki Kawaguchi

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