Title:
低誘電率材料
Document Type and Number:
Japanese Patent JP3977896
Kind Code:
B2
Inventors:
Noriko Yamada
Toru Takahashi
Shingo Katayama
Hiroshi Matsuzaki
Atsushi Nogami
Toru Takahashi
Shingo Katayama
Hiroshi Matsuzaki
Atsushi Nogami
Application Number:
JP13869097A
Publication Date:
September 19, 2007
Filing Date:
May 28, 1997
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
C08G77/22; C08G79/00; C08G77/58; H01L21/312; H01L21/768; H01L23/522; C09D183/14; C09D185/00
Domestic Patent References:
| JP10036772A | ||||
| JP10036769A | ||||
| JP4216827A | ||||
| JP2000510521A | ||||
| JP2000510520A | ||||
| JP8245792A | ||||
| JP9137121A | ||||
| JP10313002A | ||||
| JP7097548A | ||||
| JP10102003A | ||||
| JP10209142A | ||||
| JP11087330A | ||||
| JP11026444A | ||||
| JP2000077399A |
Foreign References:
| WO1995018190A1 | ||||
| WO2004074355A1 |
Attorney, Agent or Firm:
Takashi Ishida
Taijiro Ogawa
Toshio Toda
Masaya Nishiyama
Taijiro Ogawa
Toshio Toda
Masaya Nishiyama