Title:
LOW-ENERGY REFLECTION ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP3790646
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a low-energy reflection electron microscope, capable of positioning a diffraction image field in a diaphragm position at all times.
SOLUTION: When image magnification is changed by using an objective mini lens 7, an objective-lens control means 21 controls an OL power supply 19 and an OL power supply 20 so that the position of an image field formed by a system made by combining an objective lens 6 with the objective mini lens 7 is positioned at all times in the middle of a Wien filter 16. Based on the information from the objective-lens control means 21, a control device 22 supplies a potential control means 18 with a potential signal Va for positioning a diffraction image field in the position of a diffraction diaphragm 9, irrespective of changes in the image magnification by the control of the objective-lens control means 21. Based on the supplied potential signal Va, the potential control means 18 controls an electric/magnetic pole power supply 17, so that the common potential Va is given to an electric pole of the Wien filter 16 and to a magnetic pole thereof.
Inventors:
Kato Makoto
Application Number:
JP24688699A
Publication Date:
June 28, 2006
Filing Date:
September 01, 1999
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/29; H01J37/05; H01J37/141; H01J49/48; (IPC1-7): H01J37/29; H01J37/141; H01J49/48
Domestic Patent References:
| JP2000173523A | ||||
| JP59075550A | ||||
| JP9270242A | ||||
| JP4079138A | ||||
| JP1319237A |
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