PURPOSE: To provide a low-cost and simple low-temperature plasma device capable of filling the whole space between a pair of electrode plates with a gas without installing an exhaust duct, a cover for preventing the gas from scattering, etc.

CONSTITUTION: In a low-temperature plasma device, a pair of electrode plates 8 and 9 comprise metallic plates separately arranged so as to sandwich a moving material to be treated in between the plates in a reactor capable of being kept in vacuum and continuously moving the material to be treated. A gas induction pipe 1 is set at an inlet of one end of the electrodes and a mechanism for supplying a gas to a space between the electrodes is installed.