Title:
低真空軟Ｘ線実験装置
Document Type and Number:
Japanese Patent JP5839672
Kind Code:
B2
Inventors:
Southern Britain
Kazuhiro Ueda
Akio Yoneyama
Kazuhiro Ueda
Akio Yoneyama
Application Number:
JP2011212948A
Publication Date:
January 06, 2016
Filing Date:
September 28, 2011
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G21K5/00; G21K5/02; H05G2/00
Domestic Patent References:
| JP5082419A | ||||
| JP2005057205A | ||||
| JP2003229298A | ||||
| JP63307655A | ||||
| JP6011466A | ||||
| JP9080000A | ||||
| JP2001040468A | ||||
| JP2116800A | ||||
| JP5082417A | ||||
| JP3071099A | ||||
| JP4151088A | ||||
| JP4157399A | ||||
| JP2094516A | ||||
| JP2003019429A | ||||
| JP4256832A |
Foreign References:
| WO2008062710A1 |
Other References:
Yasushi Hayashi, et. al,Measurement of Divergence of Ne-Like Ar Soft X-ray Laser Generated by Capillary Z-Pinch Discharge,Japanese Journal of Applied Physics,日本,日本応用物理学会,2008年,Vol. 47, No. 2,page 977-979
Attorney, Agent or Firm:
Aoritsu patent business corporation
Polaire Patent Business Corporation
Polaire Patent Business Corporation